SiSiC Ceramic Pin Chuck

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SiSiC Ceramic Pin Chuck

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SiSiC Ceramic Pin Chuck

SiSiC Ceramic Pin Chuck

SiSiC Ceramic Pin Chuck

Ultra flat SiSiC ceramic pin chuck with 

Global flatness :< 1um

Local flatness:  <   30nm (25x25mm local zone)


For 

Semiconductor wafer inspection, lithography etc application