SiSiC Ceramic Pin Chuck

Precision Ceramic Machining Components Porous Ceramic Vacuum Chuck Table Wafer Chuck Table Reconditioning Ceramic Wafer Carrier SiSiC/SiC Pin Chuck Aluminum Nitride AIN Ceramic Heater /Cooler Electrostatic Chuck ESC

Products

SiSiC Ceramic Pin Chuck

Home > Products > Ceramic Wafer Carrier SiSiC/SiC Pin Chuck > SiSiC Ceramic Pin Chuck

SiSiC Ceramic Pin Chuck

SiSiC Ceramic Pin Chuck

SiSiC Ceramic Pin Chuck

Ultra flat SiSiC ceramic pin chuck with 

Global flatness :< 1um

Local flatness:  <   30nm (25x25mm local zone)


For 

Semiconductor wafer inspection, lithography etc application