Semixicon SiC Pin Chuck for Wafer Metrology Application with SFQR 30nm precision

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Semixicon SiC Pin Chuck for Wafer Metrology Application with SFQR 30nm precision

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Semixicon SiC Pin Chuck for Wafer Metrology Application with SFQR 30nm precision

Semixicon SiC Pin Chuck for Wafer Metrology Application with SFQR 30nm precision

超精密微細パターン加工

微細ピン(凸)を形成したSiC基板の超平坦化仕上げ加工

全面平面度0.25μm以下（300mm面内）