Multiple holes sapphire wafer carriers are used to aid in the backside thinning process of Compound Semiconductor wafers for GaAs, Indium Phosphide, and other semiconductors.

Sapphire is an anisotropic, rhombohedral crystal form of Aluminum Oxide.

Anisotropic single crystal materials exhibit some properties such as thermal expansion and hardness which vary significantly by orientation.

Sapphire wafer carriers perforated with custom patterns for vacuum hold-down or delamination and more durable than quartz and other materials

The benefits of Sapphire:

Sapphire is chemically impervious.

Zero degree sapphire wafer carriers are a good coefficient of thermal expansion match to GaAs.

Multi wafer carriers improve the demounting process.

Sapphire offers good mechanical strength due to its off-axis crystal growth that permits custom fabrication of wafer carriers as thin as 0.4572 mm. Available with diameters from 50 to 320 mm, with flats and laser markings, the wafer carriers are chip-, chemical- and scratch-resistant, and they can withstand repeated use.

Semixicon high purity sapphire wafer carriers are with excellent plasma and heat resistance, and machined with highest possible precision