Overview

We provide service of refurbishing , rebuild or custom design of various electrostatic chucks.

The electrostatic chuck (ESC) is widely applied in multiple semiconductor processes to hold the wafer in operation, we utilize Silicon Carbide , silicon nitride ,SiSic , Zerodur,or Boro sillicate glass etc silicon wafer matched thermal expansion materials to achieve advanced level of global and local flatness, currently the sizes are available from 100mm to 450mm.

Applications:

Inspection

Metrology

Coating (OLED)

Lithography

Wafer thinning

Wafer handling

Etch process

CVD and PVD

Dielectric Substrates (LED and Solar industry)

MEMS