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SiSiC Ceramic Pin Chuck

ASML  Canon Bruker, KLA  Lithography Metrology Exposure SiSiC Pin Chuck


CERAMERIC LLC is providing recondition, duplication and mofication of ultra flat precision SiSiC ,SiC, Zerodur ,Silicon Nitride etc pin chuck for  lithographic and metrology .


CERAMERIC LLC wafer pin chucks carry standard precision or better global flatness less than 300nm all through 12 inch wafer and local (30X30mm) flatness less than 50nm .


Most of the time ,a large percent of the  pin chucks of the major brands, such as ASML, Canon, Bruker, KLA can be reconditioned and restored to the original precision or even better,that is a hugh saving of the cost and lead time.


CERAMERIC LLC also welcomes all OEM equipment makers and end users to modify the pin chucks to suite the unique needs, custimization or design consulating  services from the scratch is  daily norms here.


In most the cases, CERAMERIC LLC WILL NOT CHARGE NRE for all our complimentary non obligatory engineering services 


CERAMERIC LLC takes great caution and has comprehensive polices all through our international branches in protecting customers' intellectual properties. 


We have extensive experience , simulation tools and interferometer etc equipment for the pin diameter ,pitch,sealing rings /edge design and control .

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