Ultra-Flat Zerodur Ceramic Pin Chuck, Stage for Semiconductor Equipment

Besides SiSiC pin chuck , Semixicon Cerameric also manufactures wafer pin chuck, wafer carrier and stages etc  of zerodur material for the pan semiconductor industry .

ZERODUR ceramic glass was originally developed for astronomical telescopes in the late 1960s. It has almost no thermal expansion, which means that even in the case of large temperature fluctuations, the material does not expand. Chemically, the material is very resistant and can be polished to a high standard of flatness and maintain stable precision. Our Zerodur pin chuck ,wafer carrier and stages ‘s flatness are controlled within sub-micron and nanometer scales  on 12 inch.

Zerodur chuck is ideal for the application in some process such like the laser annealing etc with heat source, our zerodur chuck will retain tight global and local flatness and brave the environmental adversities .

Semixicon Cerameric ‘s zerodur product /service includes:

Brand new ultra flat zerodur  chuck /tables for major OEM semiconductor equipment makers

Recondition legacy zerodur wafer chuck tables

Modification and redesign your wafer chuck table ,pin chuck to suit your unique needs