Semixicon WIT-H240-01 Thermal Porous Vacuum Wafer Chuck Table Key Specification

•Material: Stainless Steel 

•Adsorption area = heated area : 240*240（mm）

•Top surface planarity: 10um max. @ room temp.

•Pressure: -0.7Bar to 6.0Bar 

•Power requirement: maximum 80A @ 220VAC (1.8kw) 

•Max temp. 200°C ±2.0%) 

•Working temp. 180°C ±1.5%) 

•Temp stability: 0.5°C Heating rate: 10°C /min