Anti-Static Ceramic 

Anti-static ceramic is a class of advanced ceramics with excellent electrostatic discharge (ESD) performance, combined with high mechanical strength and thermal stability. It is widely used in electronics, microelectronics, precision instruments, and ESD-protected environments.

Physical Properties

• Specific Gravity (S.G): 3.5 – 6.0 g/cm³

• Porosity: 0 – 0.1%

• Vickers Hardness (HV1): 800 – 1500 HV

• Flexural Strength: 350 – 800 MPa

• Compressive Strength: 2000 – 4000 MPa

• Young’s Modulus: (2 – 4) × 10^11 Pa

• Fracture Toughness: 4 – 7 MPa·m^1/2

Thermal Properties

• Linear Thermal Expansion (40–400 °C): ~10 × 10^-6 /°C

• Linear Thermal Expansion (40–800 °C): ~10.5 × 10^-6 /°C

• Thermal Conductivity: 2 – 40 W/m·K

• Specific Heat: 500 – 1000 J/kg·K

Electrical Properties

• Dielectric Strength: 10 – 20 kV/mm

• Volume Resistivity (20 °C): > 10^14 Ω·cm

• Volume Resistivity (500 °C): > 10^6 Ω·cm

• Dielectric Constant (1 MHz): 8 – 12

• Dielectric Loss Tangent (1 MHz): 0.0001 – 0.001

ESD safe porous ceramic chuck table